Used Mass Flow Controllers in Tokyo, Japan

Tylan FC-770AC

Gas: SF6 Flow rate: 100 SCCM Device name: Mass flow controller (MFC)

Tylan FC-780C

Gas: O2　Flow rate: 5 SLM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400R

• Manufacturer: Horiba

Gas: O2 Flow rate: 10000 SCCM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410NC

Gas: O2　Flow rate: 5 SLM Device name: Mass flow controller (MFC)

Horiba Stec SEC-421Z

• Manufacturer: Horiba

Gas: N2 Flow: 5 L/min Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:20%SiH4/Ar Flow rate:1LM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4401M

• Manufacturer: Horiba

Gas: CH3OH Flow rate: 100 CCM Device name: Mass flow controller (MFC)

Tylan FC-780

Gas: SIH2CL2 Flow: 100 SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-F440M

• Manufacturer: Horiba

Gas: 2%B2H6/N2 Flow: 1L/min Device name: Mass flow controller (MFC)

Brooks 5877

• Manufacturer: Brooks

Gas O2 flow 1000 SCCM W170 D34 H120 Device name: Mass flow controller (MFC)

Brooks 5877

• Manufacturer: Brooks

Gas O2 flow 100 SCCM W170 D34 H120 Device name: Mass flow controller (MFC)

Tylan FC-780C

Gas Ar flow rate 200 SCCM Device name: Mass flow controller

Tylan FC-781C

Gas O2 flow 20SLMW150 D40 H155 Device name: Mass flow controller

Tylan FC-771C

Gas N2 flow 20SLMW125 D34 H170 Device name: Mass flow controller

Tylan FC-771C

Gas O2 Flow 20SLMW125 D31 H140 Device name: Mass flow controller