Used Mass Flow Controllers in Tokyo, Japan

Horiba Stec Stec SEC-410

Gas: O2 Flow: 3LM Device name: Mass flow controller (MFC)

Horiba Stec SEC-421

• Manufacturer: Horiba

Gas: O2 Flow: 1000 SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-510

• Manufacturer: Horiba

Gas:N2 Flow rate:20LM Device name: Mass flow controller (MFC)

Tylan FC-780C

Gas SiH2Cl2 Flow 100 SCCM W125 D33 H150 Device name: Mass flow controller

HORIBA STEC SEC-4400MO-UC

• Manufacturer: Horiba

Gas SiH2Cl2 Flow 200 SCCM W125 D31 H127 Device name: Mass flow controller

Tylan FC-860

Gas SiH2Cl2 Flow 100 SCCM W155 D33 H175 Device name: Mass flow controller

Tylan FC-860

Gas SiN2Cl2 Flow 100 SCCM W155 D33 H175 Device name: Mass flow controller

Aera FC-770AC

Flow rate: 200 SCCM　Gas: N2 Device name: Mass flow controller (MFC)

Aera FC-770AC

Flow rate: 200 SCCM　Gas: N2 Device name: Mass flow controller (MFC)

Aera FC-770AC

Flow rate: 200 SCCM　Gas: N2 Device name: Mass flow controller (MFC)

Aera FC-770AC

Flow rate: 20SCCM　Gas: O2 Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410NC

Gas: CF4 Flow rate: 400SCCM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410NC

• Manufacturer: Horiba

Gas: NH3 Flow rate: 50SCCM Device name: Mass flow controller (MFC)

Tylan FC-770AC

Gas: SF6 Flow rate: 100 SCCM Device name: Mass flow controller (MFC)

Tylan FC-780C

Gas: O2　Flow rate: 5 SLM Device name: Mass flow controller (MFC)