Tokyo, Japan
Tokyo, Japan
Horiba Stec SEC-4400-RC
- Manufacturer: Horiba
Gas: CCI4 Flow: 50 SCCM Device name: Mass flow controller (MFC)
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Unit UFC-1100
- Manufacturer: United Forms Corp
Gas:SiH4 Flow rate:500SCCM Device name: Mass flow controller (MFC)
Tokyo, Japan
Unit UFC-1100
- Manufacturer: United Forms Corp
Gas:SiH4 Flow rate:500SCCM Device name: Mass flow controller (MFC)
Tokyo, Japan
Unit UFC-1100
- Manufacturer: United Forms Corp
Gas:N2 Flow rate:300SCCM Device name: Mass flow controller (MFC)
Tokyo, Japan
Unit UFC-1100
- Manufacturer: United Forms Corp
Gas:N2 Flow rate:3SLM Device name: Mass flow controller (MFC)
Tokyo, Japan
Horiba Stec SEC-400MK3-K
- Manufacturer: Horiba
Gas:N2O Flow:2LM Device name: Mass flow controller (MFC)
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Horiba Stec Stec SEC-310
- Manufacturer: Horiba
Gas: 20% SiH4/He Flow: 2 L/min Device name: Mass flow controller (MFC)
Tokyo, Japan

