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Used Etching Systems

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    1997 Hitachi M-501A

    • Manufacturer: Hitachi
    • Model: M-501A

    Metal, 1CH Wafer size: 150mm

    Yongin-si, South Korea
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    1995 Shibaura CDE-80BHN

    • Manufacturer: Shibaura

    SiN/SiO, 2CH Wafer size: 200mm

    Yongin-si, South Korea
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    1998 Hitachi M-501A

    • Manufacturer: Hitachi
    • Model: M-501A

    Plasma Etcher Wafer size: 200mm

    Yongin-si, South Korea
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    2000 TEL TE8401

    • Manufacturer: Tokyo Electron - TEL

    SiN, 1CH Wafer size: 200mm

    Yongin-si, South Korea
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    1999 TEL UNITY IIe84SI

    • Manufacturer: Tokyo Electron - TEL

    Poly, IEM(1CH), Ebara Pumps (3) Wafer size: 200mm

    Yongin-si, South Korea
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    1996 TEL UNITY IIe85DPATC

    • Manufacturer: Tokyo Electron - TEL

    Oxide, PE(2CH), ATC Wafer size: 200mm

    Yongin-si, South Korea
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    1996 TEL UNITY IIe85DP

    • Manufacturer: Tokyo Electron - TEL

    Oxide, PE(2CH) Wafer size: 200mm

    Yongin-si, South Korea
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    LAM 4428

    • Manufacturer: Lam Research - Novellus

    HARDMASK ETCHER / POLY ETCHER Wafer size: 200mm

    Yongin-si, South Korea
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    STS ICP etcher

    • Manufacturer: STS

    DRIE w/Bosch process, SOI

    Yongin-si, South Korea
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    1997 FUSION 202ACU

    • Manufacturer: FUSION

    Ashing

    Yongin-si, South Korea
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    2007 AMAT DPS II

    • Manufacturer: Amat
    • Model: DPS II

    Yongin-si, South Korea
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    Alcan Tech/Canon MAS-8000

    • Manufacturer: Canon
    • Model: MAS-8000

    Plasma Photoresist Stripper

    Yongin-si, South Korea
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    Branson/IPC L-3100/L-2100

    • Manufacturer: Branson

    Plasma Barrel Stripper, 12" X 20" Quartz Chamber, 1000W RF P/S

    Yongin-si, South Korea
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    AMAT DPS_POLY

    • Manufacturer: Amat

    Wafer size: 200mm

    Yongin-si, South Korea
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    AMAT E-MAX (3chamber)

    • Manufacturer: Amat

    Wafer size: 200mm

    Yongin-si, South Korea
3435363738