Used Tegal Etching Systems

Tegal 411 Plasma Asher

• used

• Manufacturer: Tegal

TEGAL 411 PLASMA ASHER ALUMINUM CHAMBER ID 6X6X10″ WIDE

Tegal 801 Etchers

• used

• Manufacturer: Tegal

Tegal 801 Etchers (801) Tegal 801 Etchers*Inline Plasma Etcher*Fully automatic*Microprocessor-based*Plasma chemistry etcher designed especially for the etching of thin films deposited...

Tegal 803 Etchers

• used

• Manufacturer: Tegal

Tegal 803 Etchers (803) Tegal 803 Etchers*Inline Automatic Plasma Etcher*Fully automatic*Microprocessor-based plasma chemistry etcher*Designed especially for the etching of silicon di...

Tegal 965 Barrel Etcher

• used

• Manufacturer: Tegal

Tegal 965 Barrel Etcher (Tegal 965 Barrel Etcher) Tegal 965 Barrel Etcher*Batch photoresist stripper/poly/nitride etcher*13.56 ENI-ACG-10B 1000 watt generator or Tegal 600 watt system...

Tegal 915 Barrel Etcher

• used

• Manufacturer: Tegal

Tegal 915 Barrel Etcher (915) Tegal 915 Barrel Etcher*Tegal 915 Batch photoresist stripper/backside etcher*Power supply: Solid State RF*Freq.: 13.56 MHz*Maximum power: 500W *Tuning: A...

Tegal 415 Plasma Etchers

• used

• Manufacturer: Tegal

Tegal 415 Plasma Etchers (415) Tegal 415 Plasma Etchers*Barrel Type Plasma Asher Batch loaded*Barrel type plasma reactor designed specifically for use as a fast stripper of photoresis...

Tegal 703 Oxide Etcher

• used

• Manufacturer: Tegal

Tegal 703 Oxide Etcher (703) Cassette to Cassette Oxide Etcher ¿ Wafers up to 4¿ dia. ¿ Comdel 13.56 MHz generator

Tegal 903e Plasma Etchers

• used

• Manufacturer: Tegal

Tegal 903 Etcher

• used

• Manufacturer: Tegal

Tegal 903 Etcher (903) Tegal 903 Etcher*Cassette To Cassette In-line Single Wafer Plasma Etcher*Capability to etch vias and contacts with anisotropic or sloped profiles*Can handle waf...

Tegal 421 Etcher

• used

• Manufacturer: Tegal

Tegal 421 Etcher (Tegal 421 Etcher) Tegal 421 Barrel Etcher* Tegal 921 photoresist stripper/backside etcher * Operational Dual channel Barrel asher/etcher. * Temperature control* Two ...

Tegal 515 Plasma Etchers

• used

• Manufacturer: Tegal

Tegal 515 Plasma Etchers (Tegal 515 Plasma stripper) Tegal 515 Plasma stripper*Barrel Type Plasma Asher Batch loaded*Barrel type plasma reactor designed specifically for use as a fast...

Tegal CD1151-00102 Plasma Etcher

• used

• Manufacturer: Tegal

Tegal Etcher

• used

• Manufacturer: Tegal

Tegal Etcher Etcher

Tegal Plasma Etcher

• used

• Manufacturer: Tegal

Tegal Plasma Etcher Plasma Etcher