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About the Tokyo Electron - TEL Trias
The Tokyo Electron TEL Trias is a high-precision semiconductor surface treatment and cleaning system designed for reliable, repeatable wafer-level contamination control. Engineered for fabs and R&D, the TEL Trias combines automated handling with flexible wet-cleaning chemistries and process recipes to deliver consistent particle and film removal while supporting tight throughput and uptime requirements.
- Trusted Seller
TEL Tokyo Electron Loader Assembly Trias CVD Chemical Vapor Deposition Working
- Manufacturer: Tokyo Electron - TEL
- Model: Trias
“Removed from a TEL Tokyo Electron Trias CVD Chemical Vapor Deposition System” TEL Tokyo Electron Loader Assembly Trias CVD Chemical Vapor Deposition Working Inventory # A-18130 Removed from a TEL Tokyo Electron ...
$1,507 USDAlbuquerque, NM - Trusted Seller
TEL Tokyo Electron RLTEMP-000187 Stage Pedestal TC Trias CVD System Working
- Manufacturer: Tokyo Electron - TEL
- Model: Trias
“Removed from a TEL Tokyo Electron Trias CVD Chemical Vapor Deposition System” TEL Tokyo Electron RLTEMP-000187 Stage Pedestal TC Trias CVD System Working Removed from a TEL Tokyo Electron Trias CVD Chemical Vapo...
$3,207 USDAlbuquerque, NM - Trusted Seller
2006 Tokyo Electron Ltd. Trias W
- Manufacturer: Tokyo Electron - TEL
- Model: Trias
Vintage: 2006 (1) 2005 (1) Tokyo Electron Ltd. Trias W Currently Configured for: 300mm Asset HDD not included OEM TEL Tool Model Trias Process SFD-W Software Version (include revision #) V3.24R4 System P...
United States - Trusted Seller
TEL Tokyo Electron BX81-070098-15 Interface Board PCB Trias Working Spare
- Manufacturer: TEL Tokyo Electron
- Model: Trias
“Removed from a TEL Tokyo Electron Trias CF,CN,-,CO Radical Process Reactor System” TEL Tokyo Electron BX81-070098-15 Interface Board PCB Trias Working Spare Inventory # 19421 BX80-090379-15 BX08-070098-12 Remove...
$805 USDAlbuquerque, NM - Trusted Seller
TEL Tokyo Electron 3M80-000998-1D ECC2 Controller MC Rack Trias Reactor Working
- Manufacturer: Tokyo Electron - TEL
- Model: Trias
“Removed from a TEL Tokyo Electron Trias CF,CN,-,CO Radical Process Reactor System” TEL Tokyo Electron 3M80-000998-1D ECC2 Controller MC Rack Trias Reactor Working Model No: Trias MC UNIT Removed from a TEL Tokyo...
$1,001 USDAlbuquerque, NM - Trusted Seller
TEL Tokyo Electron A40366-1 Relay Board PCB TRIAS6 MB SB TEL Trias Working Spare
- Manufacturer: Tokyo Electron - TEL
- Model: Trias
“Removed from a TEL Tokyo Electron Trias CF,CN,-,CO Radical Process Reactor System” TEL Tokyo Electron A40366-1 Relay Board PCB TRIAS6 MB SB TEL Trias Working Spare Inventory # A-17492 Model No: TRIAS6 MB SB Remo...
$1,005 USDAlbuquerque, NM - Trusted Seller
2007 TEL Trias
- Manufacturer: Tokyo Electron - TEL
- Model: Trias
Tokyo Electron Ltd Trias 4-Chamber TiN Metal CVD System, 300mm, 200V, 50/60Hz, w/ dual loadport frontend; transfer chamber; 4ea process chambers assy# 3M87-057096: Mfg 2007. (traps out for cleaning) Includes: pow...
United States - Trusted Seller
2015 TEL Trias e+
- Manufacturer: Tokyo Electron - TEL
- Model: Trias
Tokyo Electron Ltd Traise+ 4-Chamber ASFD CVD System, 300mm, w/ TRT-TMZZ triple loadport frontend, TRT-LMZZ transfer chamber, 4ea process chambers assy# TEX-061: Mfg 2015. Includes: power distribution cabin...
United States - Trusted Seller
2006 TEL Trias
- Manufacturer: Tokyo Electron - TEL
- Model: Trias
Tokyo Electron Ltd Trias 4-Chamber Ti Metal CVD System, 300mm, 200V, 50/60Hz, w/ dual loadport frontend; transfer chamber; 4ea process chambers assy# 3M87-054098: Mfg 2006. Includes: 2ea RF cabinets, each w/...
United States - Trusted Seller
2010 TEL Trias K CVD sytem
- Manufacturer: Tokyo Electron - TEL
- Model: Trias
CVD System, 12” <45nm process Vintage 2010 2 Chambers: CVD & ALD Process: NiOx, HfOx Trias cluster: 2 Loadports LM: Front end Main power distribution (MPD) Transfer module, TM EX reactor, PM2: Plasma capab...
Europe Tokyo Electron Ltd. Trias Multi-Process
- Manufacturer: Tokyo Electron - TEL
- Model: Trias
Wafer size: 12"
Yongin-si, South Korea- Trusted Seller
2003 TEL TRIAS
- Manufacturer: Tokyo Electron - TEL
- Model: Trias
Wafer Size: 300mm Process: CVD Category: Thin film
Asia - Trusted Seller
2008 TEL TRIAS
- Manufacturer: Tokyo Electron - TEL
- Model: Trias
Category: thin film CVD Process: PECVD-Oxynitride Wafer size: 300mm
Asia - Trusted Seller
2007 TEL TRIAS
- Manufacturer: Tokyo Electron - TEL
- Model: Trias
Vintage 2007 Wafer size: 300mm ➢ *HDD will not be sold with this tool* ➢ Tel Trias CVD Deposition ➢ (4) Chamber Ti / TiCl Process ➢ (3) Load Ports ➢ Gases Used: Ticl4, CLF3, NH3, N2, H2, A
Singapore - Trusted Seller
Tokyo Electron Ltd. Trias Ti/TiN Chamber
- Manufacturer: Tokyo Electron - TEL
- Model: Trias
Tokyo Electron Ltd. Trias Ti/TiN Chamber Parts/Peripherals Currently Configured for 300mm wafer size EQUIPMENT DETAILS: Chamber Only Chamber Qty 4 TiN (PM1/PM2/PM3/PM4) Basic System (TEL Trias) Tool ID: DMT...
Asia
