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About the Tokyo Electron - TEL Trias
The Tokyo Electron TEL Trias is a high-precision semiconductor surface treatment and cleaning system designed for reliable, repeatable wafer-level contamination control. Engineered for fabs and R&D, the TEL Trias combines automated handling with flexible wet-cleaning chemistries and process recipes to deliver consistent particle and film removal while supporting tight throughput and uptime requirements.
Yongin-si, South Korea
Yongin-si, South Korea
Yongin-si, South Korea
Yongin-si, South Korea- Trusted Seller

Tokyo Electron Ltd. Trias Ti/TiN Chamber
- Manufacturer: Tokyo Electron - TEL
- Model: Trias
Tokyo Electron Ltd. Trias Ti/TiN Chamber Parts/Peripherals Currently Configured for 300mm wafer size EQUIPMENT DETAILS: Chamber Only Chamber Qty 4 TiN (PM1/PM2/PM3/PM4) Basic System (TEL Trias) Tool ID: DMT...
Asia

