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About the Tokyo Electron - TEL ACT-8
The Tokyo Electron TEL ACT-8 is a high-performance photolithography scanner designed for advanced semiconductor production. Engineered for tight overlay control and high throughput, the ACT-8 supports demanding node production with stable process control and automation features that help fabs maximize yield and uptime.
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2000 TEL ACT 8
- Manufacturer: Tokyo Electron - TEL
- Model: ACT-8
Main Controller Type: TEL Controller #2 Wafer Flow: Right to Left Configuration A. Wafer Size: 200mm, DUV Application, Double Block System B. Wafer Flow: Right to Left(CSB Unit is in Right side and Interface ...
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