Tokyo Electron - TEL ACT-8 Specifications

Specifications

Machine typeScanner (stepper/scanner)
Wavelength193 nm
Wafer size300 mm
Immersion capabilityYes
The above specifications are based on the 2008 model year.

Tokyo Electron - TEL ACT-8 description

The Tokyo Electron TEL ACT-8 is a high-performance photolithography scanner designed for advanced semiconductor production. Engineered for tight overlay control and high throughput, the ACT-8 supports demanding node production with stable process control and automation features that help fabs maximize yield and uptime.

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