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Used Etching Systems

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    1996 TEL UNITY IIe85DP

    • Manufacturer: Tokyo Electron - TEL

    Oxide, PE(2CH) Wafer size: 200mm

    Yongin-si, South Korea
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    LAM 4428

    • Manufacturer: Lam Research - Novellus

    HARDMASK ETCHER / POLY ETCHER Wafer size: 200mm

    Yongin-si, South Korea
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    STS ICP etcher

    • Manufacturer: STS

    DRIE w/Bosch process, SOI

    Yongin-si, South Korea
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    1997 FUSION 202ACU

    • Manufacturer: FUSION

    Ashing

    Yongin-si, South Korea
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    2007 AMAT DPS II

    • Manufacturer: Amat
    • Model: DPS II

    Yongin-si, South Korea
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    Alcan Tech/Canon MAS-8000

    • Manufacturer: Canon
    • Model: MAS-8000

    Plasma Photoresist Stripper

    Yongin-si, South Korea
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    Branson/IPC L-3100/L-2100

    • Manufacturer: Branson

    Plasma Barrel Stripper, 12" X 20" Quartz Chamber, 1000W RF P/S

    Yongin-si, South Korea
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    AMAT DPS_POLY

    • Manufacturer: Amat

    Wafer size: 200mm

    Yongin-si, South Korea
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    AMAT E-MAX (3chamber)

    • Manufacturer: Amat

    Wafer size: 200mm

    Yongin-si, South Korea
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    1996 AMAT P-5090E

    • Manufacturer: Amat

    Yongin-si, South Korea
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    1996 Shibaura CDE-74

    • Manufacturer: Shibaura

    Yongin-si, South Korea
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    1996 Shibaura CDE-74

    • Manufacturer: Shibaura

    Yongin-si, South Korea
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    1996 TEL UNITY85DP

    • Manufacturer: Tokyo Electron - TEL

    Yongin-si, South Korea
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    Shibaura CDE-80

    • Manufacturer: Shibaura
    • Model: CDE-80

    Yongin-si, South Korea
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    1996 TEL UNITY85DP

    • Manufacturer: Tokyo Electron - TEL

    Yongin-si, South Korea
3435363738