Used Deposition Equipment (Cvd, Pvd)

Electrotech PECVD ND 2

• Manufacturer: Electrotech

ELECTROTECH PECVD DEP SiN-SiC (Sio2) Gas Supply: CF4-O2-Ar-N2-N2O-SiH4-NH3-5%SiH4/Ar-CH4

Advanced Vacuum AB PV310 PECVD

• Manufacturer: STS

PECVD 6 inch Gases used: CF4-O2-Ar-N2-SiH4-NH3-5%SiH4/AR-CH4

Electrotech PECVD ND 4

• Manufacturer: Electrotech

ELECTROTECH PECVD DEP SiN-SiC (Sio2) Gases Used CF4-O2-Ar-N2-N2O-SiH4-NH3-5%SiH4/Ar-CH4

ASSY PIN LIFT 1 AND 2

• Manufacturer: Lam Research - Novellus
• Model: Altus

ASSY PIN LIFT 1 AND 2

MAINFRAME CONTROLLER

• Manufacturer: Amat
• Model: Centura

There is one in good order and filled with PCB’s. looking at it they are in the correct slots for the connectors attached. The second one is almost an empty shell, no PCB cards in the slots. Connectors are waiti...

AMAT Centura MXP+

• Manufacturer: Amat
• Model: Centura

8" Condition: Poor- Many parts removed / Tungsten Etch 3 chambers one chamber/ robot remo

AMAT Centura MXP+

• Manufacturer: Amat
• Model: Centura

8" Condition: Good- SOG etch - 4ch MxP+

Novellus C2 Altus spare parts, Sabre spare parts

• Manufacturer: Lam Research - Novellus
• Model: Altus

Contact us with your parts request NOVELLUS OEM TOOL TYPE # of Units TARA PART # PART NAME Part Number NOVELLUS C2 ALTUS 4 100303 ASSY,VENT PURGE 02-834770-00 NOVELLUS C2 ALTUS 19 100304 IO CONTROLLER 27-1015...

AMAT SOG etch CENTURA 5200

• Manufacturer: Amat
• Model: Centura

8" Condition: Good SOG etch - 4ch MxP

AMAT P5000 Gas Panel Full x 2

• Manufacturer: Amat
• Model: P5000

AMAT P5000 150mm Etch tool

• Manufacturer: Amat
• Model: P5000

Wafer size: 150mm

AMAT Centura I P1 WxZ System

• Manufacturer: Amat
• Model: Centura

AMAT Centura I P1 WxZ System; (Wxz 2ch, WxP 2ch) load lock is narrow body auto rotation...type..

AMAT Parts; Large Inventory Of AMAT Parts; P5000; ENDURA; CENTURA; HDP; CMP

• Manufacturer: Amat
• Model: P5000

2015 SENTECH SI 500 D (PE-CVD)

• Manufacturer: SENTECH

https://www.khs-semi.com/de/sentech-si-500-d-pe-cvd Features: - thin film deposition - encapsulation - coating - e.g. SiO 2 , SiN x , SiON x , a Si - up to 200 mm wafers - glovebox for high purity sample l...