
MRL Industries Bandit 218 LPCVD Furnace
- Manufacturer: Bandit
200mm LPCVD furnace tube 1: TEOS/anneal tube 2:Nitride/poly, gas connections: air low N2, N2, FG1, Ar, O2, SiH2Cl2(DCS), SiH4, NH3 2 Kashiyama vacuum pumps with blowers Schumacher M-Dot dopant source controll...

