Used Surface Treatment / Cleaning

Mattson Process chambers Module with New power plasma RPS Qty = 2

• used

• Manufacturer: Mattson

Used, chamber only

Axcelis Fusion G03 Ozone Asher. Dual chamber, Dual robot arm

• used

• Manufacturer: Axcelis

8inch wafer Used

2006 Tokyo Electron Ltd. Trias W

• used

• Manufacturer: Tokyo Electron - TEL
• Model: Trias

Vintage: 2006 (1) 2005 (1) Tokyo Electron Ltd. Trias W Currently Configured for: 300mm Asset HDD not included OEM TEL Tool Model Trias Process SFD-W Software Version (include revision #) V3.24R4 System P...

2007 TEL Trias

• used

• Manufacturer: Tokyo Electron - TEL
• Model: Trias

Tokyo Electron Ltd Trias 4-Chamber TiN Metal CVD System, 300mm, 200V, 50/60Hz, w/ dual loadport frontend; transfer chamber; 4ea process chambers assy# 3M87-057096: Mfg 2007. (traps out for cleaning) Includes: pow...

Tepla 600 Plasma Asher (RF)

• used

• Manufacturer: TePla
• Model: 600

150mm As-is or refurb

Tepla 300 Plasma Asher

• used

• Manufacturer: TePla
• Model: 300

4 available 150mm Refurbished

Tepla 300 SemiAuto Plasma Asher

• used

• Manufacturer: TePla
• Model: 300

150mm Refurbished

Tepla 300 PC Plasma Asher

• used

• Manufacturer: TePla
• Model: 300

150mm Refurbished

JST 3 DRUM CR ETCH

• used

• Manufacturer: JST

JST Etch Bench/ SA0074RO

• used

• Manufacturer: JST

Yield Engineering YES-III HMDS Vapor Prime Oven

• used

• Manufacturer: Yield Engineering
• Model: YES

Refurbished

Yield Engineering YES 58 HMDS Vapor Prime Oven

• used

• Manufacturer: Yield Engineering
• Model: YES-58

Refurbished

2006 TEL Trias

• used

• Manufacturer: Tokyo Electron - TEL
• Model: Trias

Tokyo Electron Ltd Trias 4-Chamber Ti Metal CVD System, 300mm, 200V, 50/60Hz, w/ dual loadport frontend; transfer chamber; 4ea process chambers assy# 3M87-054098: Mfg 2006. Includes: 2ea RF cabinets, each w/...

2015 TEL Trias e+

• used

• Manufacturer: Tokyo Electron - TEL
• Model: Trias

Tokyo Electron Ltd Traise+ 4-Chamber ASFD CVD System, 300mm, w/ TRT-TMZZ triple loadport frontend, TRT-LMZZ transfer chamber, 4ea process chambers assy# TEX-061: Mfg 2015. Includes: power distribution cabin...

YEILD Yield Engineering (YES) model 3TA HMDS vapor prime oven

• used

• Manufacturer: Yield Engineering
• Model: YES-3