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Used Tegal Surface Treatment / Cleaning

  • Trusted Seller
    TEGAL 411

    TEGAL 411

    • used

    • Manufacturer: Tegal

    TEGAL 411 PLASMA ASHER ALUMINUM CHAMBER FOR CASSETTES OF 4″ WAFERS ( AND SMALLER)

    Billerica, MA
  • Trusted Seller
    TEGAL 211

    TEGAL 211

    • used

    • Manufacturer: Tegal

    TABLE TOP PLASMA ETCHER/ASHER FOR UP TO 3″ DIAMETER WAFERS ALUMINUM CHAMBER WITH TIMER 0-99 MINUTES

    Billerica, MA
  • Trusted Seller
    TEGAL 415 PLASMA ASHER

    TEGAL 415 PLASMA ASHER

    • used

    • Manufacturer: Tegal

    TEGAL 415 PLASMA ASHER ALUMINUM CHAMBER ID 6X6X10″ WIDE REBUILT DIRECT DRIVE PUMP AVAILABLE FOR ADDITIONAL FEE FOMBLIN/KRYTOX PREP (IF PUMPING EXPLOSIVE GAS) ALSO AVAILABLE FOR ADDITIONAL FEE RECLAIMED FOMBLIN/KR...

    Billerica, MA
  • Trusted Seller
    Tegal 515 Plasma Asher

    Tegal 515 Plasma Asher

    • used

    • Manufacturer: Tegal

    Aluminum Chamber for Up To 5″ Wafers Single Gas Input Optional Dual Gas Control Box is Available

    Billerica, MA
  • Trusted Seller
    Tegal 901E

    Tegal 901E

    • used

    • Manufacturer: Tegal

    Tegal 901E (901E) Tegal 901E*Cassette to Cassette Poly/Nitride Plasma Etcher*13.56 MHz RF Generator*Easy to use menu driven control*Input gases controlled by MFC, up to 4 MFC with sys...

    Rocklin, CA
  • Trusted Seller
    Tegal 903E

    Tegal 903E

    • used

    • Manufacturer: Tegal

    Tegal 903E (903E) Tegal 903E*Cassette To Cassette In-line Single Wafer Plasma Etcher *Capability to etch vias and contacts with anisotropic or sloped profiles*Can handle wafers from 3...

    Rocklin, CA
  • Tegal 903E Plasma Etch System

    Tegal 903E Plasma Etch System

    • used

    • Manufacturer: Tegal

    Cassette to cassette single wafer plasma etcher system. Features: Cassette to Cassette Pick and Place Wafer Handling Specifications: Modularized for ease of Service Flow ranges: 1. 0-15 sccm (N2 calibrated) 2. 0-...

    San Jose, CA
  • Trusted Seller
    Tegal TEGAL 981

    Tegal TEGAL 981

    • used

    • Manufacturer: Tegal
    • Model: 981

    Single chamber silicon nitride etcher. Status: In Storage 8" Single chamber silicon nitride etcher

    Trim, Ireland
  • Trusted Seller
    Tegal 965

    Tegal 965

    • used

    • Manufacturer: Tegal

    Tegal Plasma Asher Model 965 Refurbished TEGAL 965 PLASMA ASHER ALUMINUM CHAMBER FOR UP TO 6" WAFERS

    Trim, Ireland
  • Trusted Seller
    TEGAL 901E RIE

    TEGAL 901E RIE

    • used

    • Manufacturer: Tegal

    Tegal 901e RIE was decommissioned in July 2018, super nice condition. 1986 vintage, and it can support two process gases. It is used primarily for O2 RIE.

    Trim, Ireland
  • Trusted Seller
    TEGAL 901 N°2

    TEGAL 901 N°2

    • used

    • Manufacturer: Tegal

    Wafer Size: 6 inch TEGAL 901 DRY ETCH Poly/SiNSiC Gases used; SF6-N2-CHF3-He-O2 Mass flow UNIT UFC1100A tegal2 O2 50sccm CHF3 50sccm CF4 50sccm SF6 100sccm N2 225sccm Pompa da vuoto 60L/min Tegal2 Transport Endun...

    Trim, Ireland
  • Trusted Seller
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    Tegal 1511E

    • used

    • Manufacturer: Tegal

    Tegal 1511E (1511E) Automatic optical emission type endpoint detection. Can be configured for 3" to 6" substrates. Power requirements: 208V, 3 Phase, 5 wire, 30A, 60 Hz.

    Rocklin, CA
  • Trusted Seller
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    Tegal 903E

    • used

    • Manufacturer: Tegal

    Tegal 903E (Tegal 903E) Tegal 903E*Cassette To Cassette In-line Single Wafer Plasma Etcher *Capability to etch vias and contacts with anisotropic or sloped profiles*Can handle wafers ...

    Rocklin, CA
  • Trusted Seller
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    Tegal Model 400 Barrel

    • used

    • Manufacturer: Tegal

    Tegal Model 400 Barrel (Tegal Model 400 Barrel )

    Rocklin, CA
  • Trusted Seller
    Tegal Tegal 901 (Poly)

    Tegal Tegal 901 (Poly)

    • used

    • Manufacturer: Tegal

    Tegal 901 (Poly) etch Wafer size: 6

    Germany
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    Tegal 981 Surface Treatment / Cleaning

    • used

    • Manufacturer: Tegal
    • Model: 981

    Good condition Tegal 981 Surface Treatment / Cleanings. Located in Ireland and other countries. Click request price for more information.

    Ireland
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