Used Etching Systems

TEL Tokyo Electron PS2 T-HV Conditioner Box T-3044SS Etcher Used Working

• used

• Manufacturer: Tokyo Electron - TEL

TEL T-3044SS PS2 T-HV Conditioner Box TEL T-3044SS Etcher working Inventory # AA-2575 This TEL T-3044SS PS2 T-HV conditioner box is used working surplus. The physical condition of the conditioner box is good and ...

Hitachi 200mm Wafer Alignment Unit M-712E Etcher No Side Panels Working Surplus

• used

• Manufacturer: Hitachi

“Removed from a Hitachi M-712E 200mm Shallow Trench Etcher System. The unit is missing all of the side panels (see photos).” Hitachi 200mm Wafer Alignment Unit M-712E Etcher No Side Panels Working Surplus Removed...

Hitachi 200mm Wafer Transfer Robot with End Effector M-712E Etcher Working

• used

• Manufacturer: Hitachi

“Removed from a Hitachi M-712E Shallow Trench Etcher System” Hitachi 200mm Wafer Transfer Robot with End Effector M-712E Etcher Working Removed from a Hitachi M-712E Shallow Trench Etcher System Made in Japan Thi...

Hitachi Wafer Alignment Unit and Controller M-712E Shallow Trench Etcher Used

• used

• Manufacturer: Hitachi

Hitachi Wafer Alignment Unit and Controller M-712E Shallow Trench Etcher Used Inventory # AA-1398 This Hitachi pre-aligner is used working surplus. It was removed from a working hitachi M-712E. Some notable compo...

2000 LAM Alliance 6 9400 PTX Etcher

• used

• Manufacturer: Lam Research - Novellus

- Lam A6 - 208 VAC - 50/60 Hz - Full Load Current: 43 Amps - Capacity of Main Breaker: 10 kA - Upgraded to Windows 7 - Using OES end point - All 3 Poly Etch Chambers - No Chiller or Pumps included 2000 V...

2018 STS / SPTS Versalis fxP Etcher

• used

• Manufacturer: SPTS

- It is configured for autoloading 200mm wafers - It has two process chambers: - CVE – XeF2 etch chamber (isotropic etching of Si) - CVD – oxide, nitride, and silicon - It does not have the Rapier chamber to run ...

STS AOE Dielectric ICP Etcher

• used

• Manufacturer: STS

STS AOE Dielectric ICP Etcher - 400 V - 50 Hz

STS Multiplex ICP Etcher

• used

• Manufacturer: STS

Metal Cluster

Lam Research 490 Polyimide plasma etcher

• used

• Manufacturer: Lam Research - Novellus

Lam Research 490 Polyimide plasma etcher Fully Rebuilt by Aspect systems. Â 6 gas inputs. ENI OEM6-XL power supply. Edwards Drystar pumping system: DP80 dry pump with EH-500 booster and 1400 controller

2005 STS ICP PRO HRM Etcher

• used

• Manufacturer: STS

150mm Bosch process STS Loadlock Chamber Loader with Robot for cassette to cassette operation (2 load stations) ESC Wafer Clamping with Backside Cooling Ebara Turbo Pump (2) Chillers The gases are: Argon M...

2001 LAM Rainbow 4420 Poly Etcher

• used

• Manufacturer: Lam Research - Novellus

1998 STS MULTIPLEX ICP Etcher

• used

• Manufacturer: STS

Vintage: 1998 Wafer size: 6", 8" Condition: as is

2010 IVY Semiconductor Engineer Wet Etcher

• used

• Manufacturer: IVY Semiconductor Engineer

Vintage: 2010 Condition: very good Very Clean Unit. One of the plastic tops on the etcher as you can see in one of the pictures is broken and will have to be replaced but everything else in great shape on this...

Technics 500-II Plasma Etcher and Asher System

• used

• Manufacturer: Technics

Technics 500-II Plasma Etcher and Asher System (Technics 500-II Plasma System) Technics 500-II Plasma System* System is fully refubished - Ready to ship.* The Stripping/Cleaning 500-II low temperature plasm...