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Used Etching Systems

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    LAM Exelan HPT -A6 (for oxide etch)

    • used

    • Manufacturer: Lam Research - Novellus

    Lam Exlean HP/HPT Oxide / Chamber A/B belongs to HPT and Chamber D belongs to HP type

    Yongin-si, South Korea
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    1991 Etch Equipment

    • used

    Menbrane etching

    Yongin-si, South Korea
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    HOE IE Enterprise HIMJ-0064

    • used

    • Manufacturer: HOE IE Enterprise

    ITO Etching system

    Yongin-si, South Korea
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    HOE IE Enterprise

    • used

    • Manufacturer: HOE IE Enterprise

    ITO Etching system

    Yongin-si, South Korea
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    1983 CANON ANELVA ILD-4002

    • used

    • Manufacturer: Anelva

    Dry etching system (SiO2)

    Yongin-si, South Korea
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    1999 MRC BMC-600

    • used

    • Manufacturer: MRC

    Dry etching system (Pt)

    Yongin-si, South Korea
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    1989 CANON ANELVA ILD-4003T

    • used

    • Manufacturer: Anelva

    Dry etching system (SiO2)

    Yongin-si, South Korea
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    1994 Applied Materials PE-8330A

    • used

    • Manufacturer: Amat

    Dry etching system (AL)

    Yongin-si, South Korea
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    1988 Applied Materials PE-8330A

    • used

    • Manufacturer: Amat

    Dry etching system (AL)

    Yongin-si, South Korea
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    1994 Applied Materials P-5030

    • used

    • Manufacturer: Amat

    Dry etching system (AL)

    Yongin-si, South Korea
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    1989 TOKYO OHKA OAPM-301B

    • used

    • Manufacturer: TOKYO OHKA

    Dry etching system (SiN)

    Yongin-si, South Korea
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    1983 TOKYO OHKA OAPM-301B

    • used

    • Manufacturer: TOKYO OHKA

    Dry etching system (SiN)

    Yongin-si, South Korea
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    1984 TOKYO OHKA OAPM-301B

    • used

    • Manufacturer: TOKYO OHKA

    Dry etching system (SiN)

    Yongin-si, South Korea
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    1989 TOYOKO KAGAKU

    • used

    • Manufacturer: TOYOKO KAGAKU

    Wet etching system （SiO2）

    Yongin-si, South Korea
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    TEL TE 5480

    • used

    • Manufacturer: Tokyo Electron - TEL

    Plasma Reactive Ion Etch System

    Yongin-si, South Korea
1819202122