Used etch

SMC 22-Port Manifold VQ1100-51 Hitachi M-712E Shallow Trench Etcher Working

• Manufacturer: SMC

“Removed from a Hitachi M-712E Shallow Trench Etcher System.” SMC 22-Port Manifold VQ1100-51 Hitachi M-712E Shallow Trench Etcher Working Inventory # A-16354 Model No: 22-Port Manifold Removed from a Hitachi M-71...

ESC Chiller Frequency Invertor Hitachi M-712E Used Working

• Manufacturer: Hitachi
• Model: M-712E

ESC Chiller Frequency Invertor M-712E used working Inventory # AA-6184 This ESC chiller frequency invertor M-712E is used working surplus. There are some scratches and blemishes on the unit. The overall physical ...

Ulvac 1020545-02-AME 200mm Wafer Heating Assembly Enviro II RF Strip Working

• Manufacturer: Ulvac
• Model: Enviro

“Removed from a Ulvac Technologies 200mm Enviro II Dual Chamber Advanced RF Strip System” Ulvac 1020545-02-AME 200mm Wafer Heating Assembly Enviro II RF Strip Working Inventory # 19971 Removed from a Ulvac Techno...

Ulvac Enviro Downstream Microwave Asher

• Manufacturer: Ulvac
• Model: Enviro

- Single Chamber Advanced Strip System - Computer - ENI OEM-6B RF Generator - 5 MFCs - Brooks Robot - Edwards IQ Pump/Blower - Manuals

2018 STS / SPTS Versalis fxP Etcher

• Manufacturer: SPTS

- It is configured for autoloading 200mm wafers - It has two process chambers: - CVE – XeF2 etch chamber (isotropic etching of Si) - CVD – oxide, nitride, and silicon - It does not have the Rapier chamber to run ...

2000 LAM Alliance 6 9400 PTX Etcher

• Manufacturer: Lam Research - Novellus

- Lam A6 - 208 VAC - 50/60 Hz - Full Load Current: 43 Amps - Capacity of Main Breaker: 10 kA - Upgraded to Windows 7 - Using OES end point - All 3 Poly Etch Chambers - No Chiller or Pumps included 2000 V...

2013 Hitachi M-8190XT

• Manufacturer: Hitachi
• Model: M-8190XT

Hitachi, M-8190XT, 300mm, Plasma Etch 3 Chambers In Fab, Warm Idle Software version: 2.0405 CIM: E84, SECS-GEM. GEM300, Interface A Hardware Configuration (fab): Main system: Hitachi HTA M-8190XT (3E) Etch ...

STS AOE Dielectric ICP Etcher

• Manufacturer: STS

STS AOE Dielectric ICP Etcher - 400 V - 50 Hz

STS Multiplex ICP Etcher

• Manufacturer: STS

Metal Cluster

2001 LAM Rainbow 4420 Poly Etcher

• Manufacturer: Lam Research - Novellus

1998 STS MULTIPLEX ICP Etcher

• Manufacturer: STS

Vintage: 1998 Wafer size: 6", 8" Condition: as is

2010 IVY Semiconductor Engineer Wet Etcher

• Manufacturer: IVY Semiconductor Engineer

Vintage: 2010 Condition: very good Very Clean Unit. One of the plastic tops on the etcher as you can see in one of the pictures is broken and will have to be replaced but everything else in great shape on this...

2005 STS ICP PRO HRM Etcher

• Manufacturer: STS

150mm Bosch process STS Loadlock Chamber Loader with Robot for cassette to cassette operation (2 load stations) ESC Wafer Clamping with Backside Cooling Ebara Turbo Pump (2) Chillers The gases are: Argon M...

2000 ULVAC Enviro 1 150mm Asher Phoenix Single Chamber Resist Stripper

• Manufacturer: Ulvac
• Model: Enviro

- Part No: Enviro 1 - Date of Manufacture: 08/23/2000 - Gases Used: NF3, H2/N2, CF4 and O2 Included Components - Main Body with Load Lock - System Control Computer Part No: E4200 - Brooks Automation Robot Part ...

Lam Research 490 Polyimide plasma etcher

• Manufacturer: Lam Research - Novellus

Lam Research 490 Polyimide plasma etcher Fully Rebuilt by Aspect systems. Â 6 gas inputs. ENI OEM6-XL power supply. Edwards Drystar pumping system: DP80 dry pump with EH-500 booster and 1400 controller