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STS / SPTS STS, SPTS ASE Multiplex ICP System, RIE Etch Advanced Silicon Etcher, complete
- Manufacturer: SPTS
United States - Trusted Seller
2018 STS / SPTS Versalis fxP Etcher
- Manufacturer: SPTS
- It is configured for autoloading 200mm wafers - It has two process chambers: - CVE – XeF2 etch chamber (isotropic etching of Si) - CVD – oxide, nitride, and silicon - It does not have the Rapier chamber to run ...
United States 
2011 SPTS/STS MUC-21 ETCHER
- Manufacturer: SPTS
GAS BOX CONFIG GAS 1: UNIT UFC-8101 100 SCCM Ar GAS 2: UNIT UFC-8101 100 SCCM O2 GAS 3: UNIT UFC-8101 600 SCCM SF6 GAS 4: UNIT UFC-8101 400 SCCM C4F8 GAS 5: MKS 649A-26199 N2 TURBO PUMP TURBO PUMP: LEYBOLD...
Wu Xi Shi, China