Device name: Mass flow controller power supply
Gas: CF4 Flow rate: 400SCCM Device name: Mass flow controller (MFC)
Gas: NH3 Flow rate: 50SCCM Device name: Mass flow controller (MFC)
Device name: Vacuum gauge
Gas:N2 Flow rate:1LM Device name: Mass flow controller (MFC)
Device name: Mass flow controller (MFC)
Gas:H2 Flow rate:10SLM Device name: Mass flow controller (MFC)
Gas:20%SiH4/Ar Flow rate:1LM Device name: Mass flow controller (MFC)
Gas: 2%B2H6/N2 Flow: 1L/min Device name: Mass flow controller (MFC)
Gas: CH3OH Flow rate: 100 CCM Device name: Mass flow controller (MFC)
Gas:HBr Flow rate:100SCCM Device name: Mass flow controller (MFC)
Gas:HCI Flow rate:2SLM Device name: Mass flow controller (MFC)
Gas: CHF3 Flow: 100 SCCM Device name: Mass flow controller (MFC)
Gas: SF6 Flow rate: 100 SCCM Device name: Mass flow controller (MFC)
Gas: SIH2CL2 Flow: 100 SCCM Device name: Mass flow controller (MFC)