Device name: Thermocouple (TC Gauge)
Device name: Temperature controller
Year Marking: Specs:.
Gas Ar flow rate 50 SCCM W130 D25 H160 Device name: Mass flow controller
Gas WF6 Flow 100 SCCM W133 D31 H127 Device name: Mass flow controller
Gas O2 Flow 500 SCCM W230 D45 H140 Device name: Mass flow controller
Gas H2 flow rate 10lMW150 D60 H180 Device name: Mass flow controller
Gas SiH2Cl2 Flow 200 SCCM W125 D31 H127 Device name: Mass flow controller
No sensor Device name: Thermocouple (TC Gauge)
Gas SiH2Cl2 Flow 100 SCCM W155 D33 H175 Device name: Mass flow controller
Gas SiN2Cl2 Flow 100 SCCM W155 D33 H175 Device name: Mass flow controller
Gas NH3 flow 500 SCCM W155 D33 H175 Device name: Mass flow controller
Gas CHF3 Flow rate 100 SCCM W150 D40 H180 Device name: Mass flow controller