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Used etch

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    HOE IE Enterprise HIMJ-0062

    • Manufacturer: HOE IE Enterprise

    BOE Etching system

    Yongin-si, South Korea
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    HOE IE Enterprise

    • Manufacturer: HOE IE Enterprise

    BOE Etching system

    Yongin-si, South Korea
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    2000 ULVAC NE-7700

    • Manufacturer: Ulvac

    Dry etching system (Pt)

    Yongin-si, South Korea
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    1983 CANON ANELVA ILD-4002

    • Manufacturer: Anelva

    Dry etching system (SiO2)

    Yongin-si, South Korea
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    2008 CANON ANELVA ILD-4033

    • Manufacturer: Anelva

    Dry etching system (SiO2)

    Yongin-si, South Korea
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    1993 Applied Materials PE-8330A

    • Manufacturer: Amat

    Dry etching system (AL)

    Yongin-si, South Korea
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    1984 TOKYO OHKA OAPM-301B

    • Manufacturer: TOKYO OHKA

    Dry etching system (SiN)

    Yongin-si, South Korea
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    1982 TOKYO OHKA OAPM-301B

    • Manufacturer: TOKYO OHKA

    Dry etching system (SiN)

    Yongin-si, South Korea
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    1985 TOYOKO KAGAKU

    • Manufacturer: TOYOKO KAGAKU

    Wet etching system （SiO2）

    Yongin-si, South Korea
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    LAM Rainbow 4428

    • Manufacturer: Lam Research - Novellus
    • Model: RAINBOW 4428

    Lam Rainbow 4420 / Poly Etch

    Yongin-si, South Korea
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    1983 CANON ANELVA ILD-4002

    • Manufacturer: Anelva

    Dry etching system (ILD-4002)

    Yongin-si, South Korea
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    1989 CANON ANELVA ILD-4003T

    • Manufacturer: Anelva

    Dry etching system (ILD-4002)

    Yongin-si, South Korea
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    TEL TE-8500S

    • Manufacturer: Tokyo Electron - TEL
    • Model: TE-8500S

    Oxide_Etch

    Yongin-si, South Korea
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    TEL Unity ME 85555SSSS

    • Manufacturer: Tokyo Electron - TEL

    Ceramic Electrostatic Chuck hardware for wafer with Dual He cooling system * 3 Process chambers

    Yongin-si, South Korea
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    1996 Mattson Aspen II

    • Manufacturer: Mattson

    Asher, 1CH(Non-ICP) Wafer size: 200mm

    Yongin-si, South Korea
2324252627