Used Etching Systems

BRANSON 3075

• Manufacturer: Branson

BRANSON 3075 PLASMA CLEANER 750 WATT GENERATOR, 3 GAS CAPABILITY 10X20″ QUARTZ BARREL INCLUDES FOMBLIN PREPPED DIRECT DRIVE VACUUM PUMP DOES NOT INCLUDE FOMBLIN OIL WITH NEW PLC CONTROL (1YEAR WARRANTY ON PLC)

PLASMA SCIENCES R.I.E. 200W

• Manufacturer: PLASMA SCIENCES

PLASMA SCIENCES R.I.E. 200W TABLE TOP REACTIVE ION ETCHER ONE WAFER UP TO 6″ DIAMETER PER CYCLE. TURBO PUMPED MICROPROCESSOR, CONTROLLED REBUILT ROUGHING PUMP MFC CONTROLS FOR 3 GASES

TECHNICS PEIIA UPGRADED

• Manufacturer: Technics

TECHNICS PEIIA UPGRADED WITH (NEW TOUCH SCREEN CONTROLS, COVERED BY 1 YEAR WARRANTY) FOR (1) 300mm WAFER WITH AE 1000W POWER SUPPLY

Tegal 411 Plasma Asher

• Manufacturer: Tegal

TEGAL 411 PLASMA ASHER ALUMINUM CHAMBER ID 6X6X10″ WIDE

Branson 4450/2

• Manufacturer: Branson

BRANSON 4450/2 DOWN STREAM PLASMA ETCHER (5) SHELVES, 7X17″DEEP DUAL GAS PM119 RF GENERATOR REBUILT VACUUM PUMPS ALSO IN STOCK (HYDROCARBON OR FOMBLIN/KRYTOX)

Hitachi M-308ATE Metal Etch System w/ Power Rack, Delatech 858 V-2 scrubber, Gas Cabinet

• Manufacturer: Hitachi
• Model: M-308ATE

Parts tool Used

2015 Ulvac NE 950 EX RIE Etch System

• Manufacturer: Ulvac
• Model: NE-950EX

- With process gases BCl₃, Cl₂, SiCl₄, CF₄, SF₆, C₄F₈, O₂, and Ar, this versatile ICP etcher is designed to etch GaN, sapphire, metals, ITO, SiC, AlN, ZnO and others - Patented ICP with magnetic confinement (“ISM...

STS / SPTS STS, SPTS ASE Multiplex ICP System, RIE Etch Advanced Silicon Etcher, complete

• Manufacturer: SPTS

Hitachi EC1 Transformer Unit Etch Chamber M-712E Trench Etcher Working Surplus

• Manufacturer: Hitachi
• Model: M-712E

“The front removable mounting brackets are slightly bent and the face is scuffed (see photos).” Hitachi EC1 Transformer Unit Etch Chamber M-712E Trench Etcher Working Surplus Inventory # A-19270, AA-1413 Removed ...

Hitachi 201A1 RF Cable 72 Foot 22M M-511E Microwave Plasma System Working

• Manufacturer: Hitachi
• Model: M-511E

Hitachi 201A1 RF Cable 72 Foot 22M M-511E Microwave Plasma System Working Removed from a Hitachi M-511E Microwave Plasma Etching System This item is working surplus. The physical condition is good, but there are ...

Hitachi M-511E Wafer Cassette Ergo Loader Assembly Working Surplus

• Manufacturer: Hitachi
• Model: M-511E

“Removed from a Hitachi M-511E Microwave Plasma Etching System.” Hitachi M-511E Wafer Cassette Ergo Loader Assembly Working Surplus Removed from a Hitachi M-511E Microwave Plasma Etching System. Installed Compone...

Lam 4520XLE

• Manufacturer: Lam Research - Novellus

Hitachi Chamber Feed-through M-712E Shallow Trench Etcher System Untested As-Is

• Manufacturer: Hitachi
• Model: M-712E

“Removed from a Hitachi M-712E Shallow Trench Etcher System. The unit is missing some components and screws (see photos).” Hitachi Chamber Feed-through M-712E Shallow Trench Etcher System Untested As-Is Sold As-I...

Hitachi 201A2 RF Cable 72 Foot 22M M-511E Microwave Plasma System Working

• Manufacturer: Hitachi
• Model: M-511E

“Removed from a Hitachi M-511E Microwave Plasma Etching System” Hitachi 201A2 RF Cable 72 Foot 22M M-511E Microwave Plasma System Working Removed from a Hitachi M-511E Microwave Plasma Etching System This item is...