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Used etch

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    1983 TOKYO OHKA OAPM-301B

    • used

    • Manufacturer: TOKYO OHKA

    Dry etching system (SiN)

    Yongin-si, South Korea
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    1984 TOKYO OHKA OAPM-301B

    • used

    • Manufacturer: TOKYO OHKA

    Dry etching system (SiN)

    Yongin-si, South Korea
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    1989 TOYOKO KAGAKU

    • used

    • Manufacturer: TOYOKO KAGAKU

    Wet etching system （SiO2）

    Yongin-si, South Korea
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    2007 AMAT DPSII AE poly G3

    • used

    • Manufacturer: Amat

    POLY ETCH Part Machine Wafer size: 300

    Yongin-si, South Korea
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    TEL TE 5480

    • used

    • Manufacturer: Tokyo Electron - TEL

    Plasma Reactive Ion Etch System

    Yongin-si, South Korea
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    1999 Applied Materials P-5040E

    • used

    • Manufacturer: Amat

    Dry etching system (Si trench)

    Yongin-si, South Korea
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    1984 TOKYO OHKA OAPM-301B

    • used

    • Manufacturer: TOKYO OHKA

    Dry etching system (O2 treatment)

    Yongin-si, South Korea
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    1995 Yokogawa Electric Rainbow-4500

    • used

    • Manufacturer: Yokogawa

    Dry etching system (R-4500)

    Yongin-si, South Korea
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    1983 TOKYO OHKA OAPM-301B

    • used

    • Manufacturer: TOKYO OHKA

    Dry etching system (O2/CF4 treatment)

    Yongin-si, South Korea
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    1999 TEL UNITY IIe84SI

    • used

    • Manufacturer: Tokyo Electron - TEL

    Poly Etch, 1 IEM CH, Ebara pumps (3) Wafer size: 200mm

    Yongin-si, South Korea
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    1999 NOVELLUS L3500

    • used

    • Manufacturer: Lam Research - Novellus

    ETCH Wafer size: 8"

    Yongin-si, South Korea
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    TEL TE5000S

    • used

    • Manufacturer: Tokyo Electron - TEL

    Dry Etch Wafer size: 6"

    Yongin-si, South Korea
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    TEL TE5000S

    • used

    • Manufacturer: Tokyo Electron - TEL

    Dry Etch Wafer size: 6"

    Yongin-si, South Korea
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    LAM RANBOW 4420

    • used

    • Manufacturer: Lam Research - Novellus

    Dry Etch Wafer size: 6"

    Yongin-si, South Korea
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    LAM RANBOW 4500

    • used

    • Manufacturer: Lam Research - Novellus

    Dry Etch Wafer size: 6"

    Yongin-si, South Korea
2122232425