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Used Etching Systems

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    1996 Mattson Aspen II

    • Manufacturer: Mattson

    Asher, 1CH(Non-ICP) Wafer size: 200mm

    Yongin-si, South Korea
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    AMAT IPS

    • Manufacturer: Amat

    Generator Rack / Chamber

    Yongin-si, South Korea
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    1998 Shibaura CDE-80HN

    • Manufacturer: Shibaura

    Poly, 2CH Wafer size: 200mm

    Yongin-si, South Korea
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    TEL UNITY IIe655DD

    • Manufacturer: Tokyo Electron - TEL

    Oxide, DRM(2CH) Wafer size: 150mm

    Yongin-si, South Korea
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    TEL UNITY Me SCCM

    • Manufacturer: Tokyo Electron - TEL

    Oxide,SCCM(3CH) Wafer size: 200mm

    Yongin-si, South Korea
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    LAM 4528

    • Manufacturer: Lam Research - Novellus

    PASSIVATION ETCHER Wafer size: 200mm

    Yongin-si, South Korea
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    LAM 496B

    • Manufacturer: Lam Research - Novellus
    • Model: 496B

    Poly Etcher

    Yongin-si, South Korea
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    1999 Hitachi M-511A

    • Manufacturer: Hitachi

    Poly Etcher Wafer size: 200mm

    Yongin-si, South Korea
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    1997 LAM EXCLEAN

    • Manufacturer: Lam Research - Novellus

    Yongin-si, South Korea
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    1995 AMAT P-5090E

    • Manufacturer: Amat

    Yongin-si, South Korea
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    1997 Shibaura CDE-80AN

    • Manufacturer: Shibaura

    Yongin-si, South Korea
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    1996 Shibaura CDE-74

    • Manufacturer: Shibaura

    Yongin-si, South Korea
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    1999 TEL UNITY85DD

    • Manufacturer: Tokyo Electron - TEL

    Yongin-si, South Korea
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    1998 TEL UNITY85DD

    • Manufacturer: Tokyo Electron - TEL

    Yongin-si, South Korea
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    1995 TEL UNITY85DM［SiO2 ZL］

    • Manufacturer: Tokyo Electron - TEL

    Yongin-si, South Korea
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