Tokyo, Japan
Horiba Stec SEC-7330M
- Manufacturer: Horiba
Gas: B2H6 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)
Tokyo, Japan
Brooks 5877
- Manufacturer: Brooks
Gas CF4 flow rate 100 SCCM W210 D40 H130 Device name: Mass flow controller (MFC)
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan- Tokyo, Japan
- Tokyo, Japan
- Tokyo, Japan
Tokyo, Japan- Tokyo, Japan
- Tokyo, Japan
Tokyo, Japan

