Tokyo, Japan
Tokyo, Japan- Tokyo, Japan
- Tokyo, Japan
- Tokyo, Japan
Tokyo, Japan- Tokyo, Japan
- Tokyo, Japan

Unit UFC-1100
- Manufacturer: United Forms Corp
Gas:HE Flow:20SCCM Device name: Mass flow controller (MFC)
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Unit UFC-1100
- Manufacturer: United Forms Corp
Gas:HCL Flow rate:100SCCM Device name: Mass flow controller (MFC)
Tokyo, Japan
Horiba Stec Stec SEC-410
- Manufacturer: Horiba
Gas:N2 Flow rate:1LM Device name: Mass flow controller (MFC)
Tokyo, Japan
Tokyo, Japan

