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  • Unaxis VERSALINE ICP(DSE-III)

    Unaxis VERSALINE ICP(DSE-III)

    • Manufacturer: Unaxis

    Plasmatherm Unaxis ICP Etcher 6inch ESC Chuck VERSALINE - Loadlock Chamber & Transfer Chamber 6inch Cassette Type - Process Chamber 6inch ESC Chuck Type - RF Generator Module. - Monitor Rack - Chiller Unit S/N ...

    Gyeonggi-do, South Korea