Used automation component

2000 ULVAC Enviro 1 150mm Asher Phoenix Single Chamber Resist Stripper

• Manufacturer: Ulvac
• Model: Enviro

- Part No: Enviro 1 - Date of Manufacture: 08/23/2000 - Gases Used: NF3, H2/N2, CF4 and O2 Included Components - Main Body with Load Lock - System Control Computer Part No: E4200 - Brooks Automation Robot Part ...