Tokyo, Japan
2016 ULVAC SIV-500
- Manufacturer: Ulvac
- Model: SIV-500
Manufacturing process: film deposition | Inch: 6
Tokyo, Japan
Tokyo, Japan
2006 ULVAC ei-5
- Manufacturer: Ulvac
- Model: EI-5
Manufacturing process: film deposition | Inch: Square Substrate
Tokyo, Japan
2006 ULVAC ei-5
- Manufacturer: Ulvac
- Model: EI-5
Manufacturing process: film deposition | Inch: Square Substrate
Tokyo, Japan

