HiEtch ICP Etcher BMR
- Manufacturer: HiEtch ICP Etcher
Yongin-si, South KoreaICP Etcher (RIE) BMR
- Manufacturer: ICP Etcher (RIE)
Yongin-si, South KoreaVHX PECVD BMR
- Manufacturer: VHX PECVD
Yongin-si, South KoreaPLASMA ASHER BMR
- Manufacturer: PLASMA ASHER
Yongin-si, South KoreaCograde RF3000 Femto Science
- Manufacturer: Cograde RF3000
Yongin-si, South KoreaGAMMA ASHER
- Manufacturer: GAMMA
Yongin-si, South KoreaULTIMA3 ASHER
- Manufacturer: ULTIMA3
Yongin-si, South KoreaAXCELIS ASH-MTL_202A(EATON)
- Manufacturer: Axcelis
Yongin-si, South Korea- Yongin-si, South Korea
LAM Research 2300 Exelan Flex
- Manufacturer: Lam Research - Novellus
- Model: 2300 EXELAN FLEX
Wafer size: 12"
Yongin-si, South Korea- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
Tokyo Electron Ltd. Tactras Vigus
- Manufacturer: Tokyo Electron - TEL
- Model: TACTRAS VIGUS
Wafer size: 12"
Yongin-si, South Korea- Yongin-si, South Korea
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