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2005 TEL Unity 2e 855DP (Poly Chamber)
- Manufacturer: Tokyo Electron - TEL
TEL Unity 2e 855DP (Poly Chamber) Wafer size: 200MM
Asia 
Yongin-si, South Korea- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
Tokyo Electron Ltd. TELINDY Oxide
- Manufacturer: Tokyo Electron - TEL
- Model: TELINDY OXIDE
Yongin-si, South KoreaTokyo Electron Ltd. Tactras Vigus
- Manufacturer: Tokyo Electron - TEL
- Model: TACTRAS VIGUS
Wafer size: 12"
Yongin-si, South KoreaTokyo Electron Ltd. Telius 305 SCCM
- Manufacturer: Tokyo Electron - TEL
- Model: TELIUS 305 SCCM
Wafer size: 12"
Yongin-si, South KoreaTokyo Electron Ltd. Telius 305 DRM
- Manufacturer: Tokyo Electron - TEL
- Model: TELIUS 305 DRM
Wafer size: 12"
Yongin-si, South KoreaTokyo Electron Ltd. Telius SP 305 DRM
- Manufacturer: Tokyo Electron - TEL
- Model: TELIUS SP 305 DRM
Wafer size: 12"
Yongin-si, South Korea- Yongin-si, South Korea
- Yongin-si, South Korea
TEL Unity ME 85555SSSS
- Manufacturer: Tokyo Electron - TEL
Ceramic Electrostatic Chuck hardware for wafer with Dual He cooling system * 3 Process chambers
Yongin-si, South Korea- Yongin-si, South Korea
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