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Used function modules

  • Trusted Seller
    1994 TEL Clean Track Mk

    1994 TEL Clean Track Mk VII - 150mm Track

    • Manufacturer: Tokyo Electron - TEL

    TEL Clean Track Mk VII - Track Vintage: 1994 Wafersize: 150mm 200mm convertible: Yes Dimensions & weight estimates: Mainframe dim (cm): 345 x 140 x 182 Mainframe weight (kg): Bypack1 dim (cm): 140 x 100 x ...

    Europe
  • Trusted Seller
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    TEL CLEAN TRACK LUTHIUS COAT ONLY

    • Manufacturer: Tokyo Electron - TEL

    5 available 300mm Coat only Track Resist Processing Equipment General: · Block 1: Carrier w/ Wafer Transfer Arm · Block 2: Process w/ Wafer Transfer Arm · Block 3: Stepper Interface Main (Dummy) · AC Powe...

    Europe