
2007 Tel ACT12
- Manufacturer: Tokyo Electron - TEL
- Model: ACT-12
two process blocks ACT 12 PIQ with 16 HCH Plates, 4 PCT´s 2 DEV Units, 1 WEE last time in production: 07.08.2024
Regensburg, Germany
two process blocks ACT 12 PIQ with 16 HCH Plates, 4 PCT´s 2 DEV Units, 1 WEE last time in production: 07.08.2024