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Used Tokyo Electron - TEL Lithography (Photolithography) in Germany

  • 2007 Tel ACT12

    2007 Tel ACT12

    • Manufacturer: Tokyo Electron - TEL
    • Model: ACT-12

    two process blocks ACT 12 PIQ with 16 HCH Plates, 4 PCT´s 2 DEV Units, 1 WEE last time in production: 07.08.2024

    Regensburg, Germany
  • 2004 Tel ACT8-D

    2004 Tel ACT8-D

    • Manufacturer: Tokyo Electron - TEL
    • Model: ACT-8

    ACT DB System, AC Power Box, T/C Unit 1+2, T/H Controller ESA 1+2, Chemical Cabinet 1, 2, 3

    Regensburg, Germany
  • 2013 Tel ACT8-D

    2013 Tel ACT8-D

    • Manufacturer: Tokyo Electron - TEL
    • Model: ACT-8

    AC Power Box, T/C Unit, T/H Controller 1+2, Chemical Cabinet Last Time in production: 5/5/25 Contact: Agthen Robert (FE DRS P M2 MNT LIT)

    Regensburg, Germany