Used system sensor

TEL Tokyo Electron CPHP General Chamber CPHG Type 1 Lithius Damaged MPS Untested

• Manufacturer: Tokyo Electron - TEL
• Model: HTE-MC1-B-12

“The unit has a damaged MPS vacuum sensor and the front panel is slightly bent (see photos). Removed from a TEL Tokyo Electron Clean Track Lithius System” TEL Tokyo Electron CPHP General Chamber CPHG Type 1 Lithi...