Used SPTS muc-21 Etching Systems

2011 SPTS/STS MUC-21 ETCHER

• Manufacturer: SPTS

GAS BOX CONFIG GAS 1: UNIT UFC-8101 100 SCCM Ar GAS 2: UNIT UFC-8101 100 SCCM O2 GAS 3: UNIT UFC-8101 600 SCCM SF6 GAS 4: UNIT UFC-8101 400 SCCM C4F8 GAS 5: MKS 649A-26199 N2 TURBO PUMP TURBO PUMP: LEYBOLD...