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SPTS FXP cluster PVD system
- Manufacturer: SPTS
SPTS FXP cluster PVD system Configuration: 200mm/8“ Two Load Locks Station 1 – VCEA Station 8 – VCEB A Hot Sputter Etch Chamber Station 2 (DepE – H SE) Three Deposition Chambers Station 3 (DepC – HU Platen Alumin...
Bree, Ireland

