Used Lithography (Photolithography)

SemiTherm VTP 1500 LH LPCVD Reactor (SiN)

• Manufacturer: SemiTherm

SemiTherm VTP 1500 LH LPCVD Reactor (SiN) SemiTherm VTP 1500 LH LPCVD (SiN) Reactor is configured for SiN processing of 200 mm wafers. System is fully automated with cassette to cassette handling and offers h...

Karl Suss MA24 Mask Aligner

• Manufacturer: SÜSS MicroTec

Karl Suss MA24 Mask Aligner Karl Suss MA24 mask aligner configured for simultaneous double side exposure and cassette to cassette handling of 4" wafers. Tool is equipped with diffraction reducing optical sys...

Complete photolitographic line FALCON

• Manufacturer: Fairchild Convac GmbH (with cooperation of Suss Microtec Technologies)

Complete photolitographic line FALCON Vintage: 1997 - Wafer size: 8 inch Layout: - it has 1 coater, 1 developer - see attached Footprint.jpg - it has 2 pcs. of installed Coldplates - see attacehed photo - it has ...

Wafer Loader Robot Controller

• Manufacturer: Nikon

Nikon Controller, WLT31 / Wafer Loader Robot Controller / V 2.40 / Nikon

1993 DNS SKW-60A-BVPE Coater Developer

• Manufacturer: Dainippon Screen
• Model: SK-W60A-BVPE

EVG Hercules Lithography Track System (200mm)

• Manufacturer: EVG
• Model: Hercules

EVG Hercules Lithography system 200mm - available in working wafer fab cleanroom - July 2024

SEMIX / TAZMO

• Manufacturer: SEMIX

for Wafer Size: 4"- 6" Coater systems, 4"-6" (3) Zone hotplate Single / double cassette Fluoroware type with pitch of 3/16" for (25) Wafers SOG Nozzles: 0.85mm, 1/16" tubing Nozzle capping mechanism Nozzle clean...

MUSCAT SPL-347 Developer 8/6"

• Manufacturer: MUSCAT

Available from a working cleanroom waferfab in July 2024 - contact CSI Semi

MUSCAT T200 Developer 8/6"

• Manufacturer: MUSCAT

Available in a working cleanroom waferfab July 2024 - contact CSI Semi

FSI Polaris 2200 ( 200mm )

• Manufacturer: FSI

FSI Polaris 2200 - available July 2024 ( 200mm )

Nikon EX12B Stepper 200mm

• Manufacturer: Nikon

Nikon EX12B Stepper - available July 2024 ( 200mm ) contact : csisemi

Fairchild Convac FM 6000, Wafer Coater

• Manufacturer: Fairchild

Fairchild Convac FM 6000, Wafer Coater complete automatic edge handling for 150 mm wafers, 2 coating lines with IntelliGen coating pumps, incl.Spare parts (chucks, electronic boards etc. USED, IN GOOD VISUAL ...

TEL Act 8 Part Servo Pack

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Part Servo Pack for Tel Act 8 Part Name Dev 3-4 Spinner Motor Driver Height .18 Mtrs Width .12 Mtrs Depth .23 Mtrs Physical Volume .00 M3 Weight 2.25 Kgs AC Input: AC Output: Volts: 200-230 Volts: 0...

TEL Act 8 Part Servo Pack

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Part Servo Pack for Tel Act 8 Part Name Dev 3-2 Spinner Motor Driver Height .18 Mtrs Width .12 Mtrs Depth .23 Mtrs Physical Volume .00 M3 Weight 2.25 Kgs Remarks AC Input: AC Output: Volts: 200-230...

TEL Act 8 Part Dev 3-3 Dispense Line/Dispense Valves/Water Jacket - Chemical

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Part Dev 3-3 Dispense Line/Dispense Valves/Water Jacket - Chemical for Tel Act 8 Height .60 Mtrs Width .60 Mtrs Depth .14 Mtrs Physical Volume .05 M3 Weight 4.75 Kgs