Building Filters
Tokyo, JapanCanon Canon No52
- Manufacturer: Canon
DR mask for MPA500, MPA600 6-inch mask size: 7-inch round standard glass wafer with glass special chuck
Tokyo, JapanCanon BY9-8083 No3
- Manufacturer: Canon
- Model: BY9
Mask size for 5-inch: 6-inch square Device name: Aligner adjustment mask
Tokyo, Japan- Tokyo, Japan

2002 Hitachi High-Tech Hitachi High-Tech S-3500N
- Manufacturer: Hitachi
- Model: S-3500N
emax failure Device name: Scanning electron microscope (SEM)
Tokyo, Japan
Hitachi S-2600H
- Manufacturer: Hitachi
- Model: S-2600H
Device name: Scanning electron microscope (SEM) | Remarks: PC startup not possible
Tokyo, Japan
Tokyo, Japan
Nikon Nikon OPTIPHOT-100
- Manufacturer: Nikon
- Model: Optiphot 100
CCD camera, with controller, no PC Device name: metallurgical microscope
Tokyo, Japan
Tokyo, Japan
Hitachi High-Tech Hitachi High-Tech S-3500N
- Model: S-3500N
Model year: February 2002 Specification: EMAX malfunction

Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
