Semiconductors » Lithography (Photolithography) » Coat/Develop Tracks

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Used Coat/Develop Tracks

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Overview

Coat/develop tracks are automated wet-process systems used in photolithography to apply photoresist, perform bakes, and develop exposed wafers. They combine spin-coaters, bake plates, developer modules, solvent handling and cassette automation into a single linear track for consistent film thickness and high throughput. Used units differ by cassette size, automation level and chemical compatibility — confirm wafer size, resist types, cleanroom class and factory automation interfaces before buying.

FAQ

What should I inspect when buying a used coat/develop track?

Check cassette capacity, wafer size support, history of chemical use, maintenance logs, pump and spinner condition, and whether OEM parts and service manuals are included.

How do I handle shipping for a track previously used with photoresists?

Arrange certified decontamination, drain and purge chemical lines, secure components for transport, use climate-controlled freight if needed, and get cleanroom contamination paperwork.

What utilities and services are required for installation?

Typical needs include DI water, solvent drains, nitrogen and/or dry air, proper electrical supply, exhaust and ventilation, and sometimes chilled water or vacuum lines—verify site specs ahead of time.

How often does a coat/develop track need preventive maintenance?

Regular tasks include filter and pump replacement, seal and tubing inspection, spinner bearing checks, bake plate calibration and solvent line cleaning; schedule depends on throughput and chemical aggressiveness.

Are spare parts and consumables easy to source?

OEM consumables and critical spares can have long lead times; confirm availability of seals, pump parts, spin chucks and controllers or reliable third‑party suppliers before purchase.