Used function modules

2009 Rena Electroplating Wet Bench

• Manufacturer: Rena

1. General − Currently set for 6" wafers - Capable of 8" wafers − 1 Copper (Cu) Plating Chamber - 1 Tin (Sn) Plating Chamber − 1 QDR Rinsing Module 2. Main Body − 1 mainbody made of fire retardant white PP...