Used Mass Flow Controllers in Tokyo, Japan

Tylan FC-770AC

Gas: SF6 Flow rate: 100 SCCM Device name: Mass flow controller (MFC)

Tylan FC-780C

Gas: O2　Flow rate: 5 SLM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400R

• Manufacturer: Horiba

Gas: O2 Flow rate: 10000 SCCM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410NC

Gas: O2　Flow rate: 5 SLM Device name: Mass flow controller (MFC)

Horiba Stec SEC-421Z

• Manufacturer: Horiba

Gas: N2 Flow: 5 L/min Device name: Mass flow controller (MFC)

Tylan FC-770AC

Gas: He Flow: 100 SCCM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:20%SiH4/Ar Flow rate:1LM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4401M

• Manufacturer: Horiba

Gas: CH3OH Flow rate: 100 CCM Device name: Mass flow controller (MFC)

Tylan FC-780

Gas: SIH2CL2 Flow: 100 SCCM Device name: Mass flow controller (MFC)

Unit UFC-1200

• Manufacturer: United Forms Corp

Gas: AR Flow: 100 SCCM Device name: Mass flow controller (MFC)

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:N2 Flow:100SCCM Device name: Mass flow controller (MFC)

Aera FC-770AC

Flow rate: 500 SCCM Gas: AR Device name: Mass flow controller (MFC)

Aera FC-770AC

Flow rate: 200 SCCM Gas: AR Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:N2 Flow rate:200CCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400-RC

• Manufacturer: Horiba

Gas: CCI4 Flow: 50 SCCM Device name: Mass flow controller (MFC)