Building Filters
1995 CDE CDE80/2 Plasma Etch
- Manufacturer: CDE
The system was in production until February 2025. Plasma Etch
Regensburg, Germany1995 CDE CDE80/3 Plasma Etch
- Manufacturer: CDE
The system was in production until February 2025. Plasma Etch
Regensburg, Germany
2008 LAM Research Corp. 2300 Kiyo
- Manufacturer: Lam Research - Novellus
- Model: 2300 KIYO
Semiconductor ETC Chamber with RF Cart Incl. Gasbox and Rocker Valve
Regensburg, Germany
2000 LAM Research Corp. L4500/7D
- Manufacturer: Lam Research - Novellus
LAM 45xx/7D Tool for isotropic and Oxyd etch processes.
Regensburg, Germany
