Building Filters
2016 Nexx Apollo PVD
The Nexx Apollo PVD system is a fully automated Physical Vapor Deposition (PVD) tool using a multiple wafer multiple chamber design. The system deposits thin metal films used in interconnect metallization on wafe...
Regensburg, Germany
2011 Semitool Cintillio SAT
- Manufacturer: Semitool
Toolcontroller with Windows XP Remote controller Ready for endpointdetection system Process: Copper / Titan-Wolfram / dHF (dilluted HF) div. spareparts possible (negotiable)
Regensburg, Germany
2016 LAM Research Corp. WETV18-04
- Manufacturer: Lam Research - Novellus
SEZ 304 Minimum: 150 mm | Maximum: 300 mm | Set size: 300 mm | Number of robots: 1 | Tank material: PVDF | Automatic wafer transfer: YES | Controller type: Microprocessor Controller Type | Other information: the ...
Regensburg, Germany
