Used Surface Treatment / Cleaning in Wexford, Ireland

StripperAsher

• used

• Manufacturer: Unknown

Novellus / Gasonics PEP 3510+ Dual Chamber High Throughput Downstream Photoresist Removal System SN M981580 Please see actual DS for full config details (linked) Backing Pumps are not included with this system

StripperAsher

• used

• Manufacturer: Unknown

Process Asher Strip Software Version 4.2.0.12 System Power Rating 208AC, 3 Phase Loading Configuration 2 chambers & 2 Loadposts Chm Position 1 Bulk strip N2, O2, H2N2 Chm Position 2 Bulk strip N2, O2, H2N2

StripperAsher

• used

• Manufacturer: Unknown

System is currently idle in the Fab.

CANON System 3600 Microwave Ashing System

• used

• Manufacturer: Canon

Microwave Ashing System, 2ea Available

TEGAL 411 Plasma Barrel Stripper

• used

• Manufacturer: Tegal

Plasma Barrel Stripper

Shibaura CDE8 Etch

• used

• Manufacturer: Shibaura

Shibaura CDE8

Bevel Etch

• used

• Manufacturer: Unknown

Tool is stored in a storage room as of March 25th, 2015. Confirmed with Fab 15 there is no missing part and is one damaged part, and no modification record. [Chamber A] Chamber type:Bevel Gas config. (sccm)=MFC f...

StripperAsher

• used

• Manufacturer: Unknown

StripperAsher

• used

• Manufacturer: Unknown

System de-installed on 23-May-14. System still located at its Fab location. Process: Etch-Ashing Wafer Handling Configuration -Full batch/ single wafer: Single wafer -Robot: Yaskawa robot -Robot blade: Dual blade...

Dielectric Etch

• used

• Manufacturer: Unknown

Tool is stored in a storage room as of March 25th, 2015. [Chamber A] Chamber type:SCCM Jin Gas config. (sccm)=FCS full scale 2line(advanced radical distribution control) Ar(1776)/C4F6(50.3)/C4F8(43)/CF4(336) O2(6...

StripperAsher

• used

• Manufacturer: Unknown

Novellus / Gasonics PEP 3510A Dual Chamber Downstream Photoresist Removal System SN M981510 Please see actual DS for full config details (linked) Backing Pumps are not included with this system

StripperAsher

• used

• Manufacturer: Unknown

Novellus / Gasonics PEP 3510A Strip/Ash System SN 98040 • Currently Configured for 200mm Wafer Sizes • MFG Date: Jul 1997 • Last PM Date: Oct 27, 2008 • Install Type: Stand Alone • Application: Photoresist Remova...

StripperAsher

• used

• Manufacturer: Unknown

Novellus / Gasonics PEP 3510+ Dual Chamber High Throughput Downstream Photoresist Removal System SN M983110 Please see actual DS for full config details (linked) Backing Pumps are not included with this system

StripperAsher

• used

• Manufacturer: Unknown

• Currently configured for 200mm (8in) wafer sizes • MFG Date: 1997 • CE Marked • Install type: Thru-the-wall (TTW) • System software (OS): Win NT4 • System software (App): 5.6 • Cassette Interface: o (2) 200mm (...

StripperAsher

• used

• Manufacturer: Unknown

Status: Tool is at T&H warehouse, de-instlled on 2010 Jun 14 Key parameter Items: 1) Chamber Base Pressure(mTorr) PC&= 40 2) Chamber leak rate(mTorr/min) PC&= 40 3) Susceptor Temperature Control 90 degrees C ±10 ...