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Used Supporting Equipment (Semiconductors) in Gyeonggi-do, South Korea

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    AMAT Mirra

    • Manufacturer: Amat
    • Model: MIRRA

    Process : STI/SOD/SON Chm Position 1 Platen 1 slurry POUs Slurry / DIW / Hi-PHDIW Chm Position 2 Platen 2 slurry POUs Slurry / DIW / Hi-PHDIW Chm Position 3 Platen 3 slurry POUs Slurry / DIW / Hi-PHDIW

    Yongin-si, South Korea
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    IPEC Speedfam Avantgaard 676

    • Manufacturer: Speedfam

    CMP System

    Yongin-si, South Korea
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    AMAT Mirra

    • Manufacturer: Amat
    • Model: MIRRA

    CMP/SCRUBBER, CU / ILD / STI / W Wafer size: 200mm

    Yongin-si, South Korea
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    1991 Axcelis(Eaton/Fusion) 200PCU

    • Manufacturer: Axcelis
    • Model: 200PCU

    Yongin-si, South Korea
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    DNS DNS SS-3000-A

    • Manufacturer: Dainippon Screen
    • Model: SS-3000A

    Wafer size: 12

    Yongin-si, South Korea
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    KORNIC(AP system) RTP-600M

    • Manufacturer: KORNIC

    RTP, wafer diffusion Wafer size: 4", 6"

    Yongin-si, South Korea
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    1993 DNS SSW-80A-A

    • Manufacturer: Dainippon Screen
    • Model: SS-W80A-A

    Wafer size: 8

    Yongin-si, South Korea
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    2007 NOVELLUS CONCEPT 3 SPEED

    • Manufacturer: Lam Research - Novellus

    Wafer size: 12

    Yongin-si, South Korea
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    2005 NOVELLUS CONCEPT 3 SPEED

    • Manufacturer: Lam Research - Novellus

    Wafer size: 12

    Yongin-si, South Korea
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    2005 NOVELLUS CONCEPT 3 SPEED

    • Manufacturer: Lam Research - Novellus

    Wafer size: 12

    Yongin-si, South Korea
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    1996 NOVELLUS 676

    • Manufacturer: Lam Research - Novellus

    Wafer size: 8

    Yongin-si, South Korea
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    TDK HIMEC PIJ-WH300-WAFER LOADER

    • Manufacturer: TDK HIMEC

    Wafer size: 8

    Yongin-si, South Korea
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    2004 NOVELLUS CONCEPT 3 SPEED

    • Manufacturer: Lam Research - Novellus

    Wafer size: 12

    Yongin-si, South Korea
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    NOVELLUS CONCEPT 3 GAMMA 2130

    • Manufacturer: Lam Research - Novellus

    Wafer size: 12

    Yongin-si, South Korea
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    NOVELLUS CONCEPT 3 GAMMA 2130

    • Manufacturer: Lam Research - Novellus

    Wafer size: 12

    Yongin-si, South Korea
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