2006 N&K N&K 5700 CDRT
used
- Manufacturer: N&K
Broadband spectrometry for film thickness and trench profile measurements on photomask reticles. The n&k 5700-CDRT automated system is designed for handling 5” or 6” square masks. The n&k 5700-CDRT simultaneously...
Cheonan-si, South Korea1997 LEO/KOBELCO LTA-700
used
- Manufacturer: Kobelco
Variiable Injection Type Wafer Lifetime Measuring System.
Cheonan-si, South KoreaHITACHI S-5500
used
- Manufacturer: Hitachi
- Model: S-5500
In-lens Field Emission Scanning Electron Microscope. Imgae Resolution : - 0.4nm guaranteed at accelerating voltage 30kV - 1.6nm guaranteed at accelerating voltage 1kV Magnification : - LM Mode 60X~100,0000X - H...
Cheonan-si, South Korea1998 SOLID STATE MEASRUEMENT INC. SSM150
used
- Manufacturer: SOLID STATE MEASRUEMENT INC.
*. Measurement perfomance: - Resistivity and Dopant concentration - Resistance measurement & Carrier concentration profile analysis in all structures of silicon *. Measurement configuration: - Carrier concentrati...
Cheonan-si, South Korea2001 SOLID STATE MEASRUEMENT INC. SSM495
used
- Manufacturer: SOLID STATE MEASRUEMENT INC.
■ Capable up to 8" Wafer ■ SSM 42 Capacitance Measurement Unit ■ Motor control unit ■ Pneumatic control Unit ■ PC System ■ PROCAP software ■ Performance ■ Drive Signal Frequency at 1Mhz voltage=15mV rms ■ CDA: 80...
Cheonan-si, South Korea2004 SOLID STATE MEASRUEMENT INC. SSM5130
used
- Manufacturer: SOLID STATE MEASRUEMENT INC.
■ Capable up to 12" Wafer ■ SSM 52 Capacitance Measurement Unit ■ Auto wafer handling (Genmark robot & pre aligner) ■ Motor control unit ■ Pneumatic control Unit ■ PC System ■ PROCAP software ■ Performance ■ Driv...
Cheonan-si, South Korea1992 PROMETRIX RS 35
used
- Manufacturer: PROMETRIX
*. Measurement perfomance: - 4 Point Probe check surface on Silicon wafer - Measurement range 5 Megohm/sq - Routine check 1-30 sites programmable - Counter/ 3-D map, Diameter scan 49,81,121,225,361,441,625 site...
Cheonan-si, South KoreaN&K N&K 1700
used
- Manufacturer: N&K
*. Film Thickness and Trench profile measurement. *. Manual load Metrology system. *. Simultaneously determine thickness, n and k in the spectral range of 190-1000nm, trench profile and provide non-destructive, r...
Cheonan-si, South Korea1997 KLA TENCOR P-11
used
- Manufacturer: KLA-Tencor
- Model: P-11
- Long Scan Profiler P-11 Measurement. - Micro Head sr with Orange stylus. - Pentium 233MHz, Ram 31MB & 17" LCD Color Monitor, Windows 3.1. - Installed in Clean-room.
Cheonan-si, South Korea1996 BIO-RAD QS-408M
used
- Manufacturer: Bio-Rad
- Model: QS-408M
*. BIO-RAD FTIR QS-408. *. BPSG,EPI. *. Installed in Clean-room. *. Can demonstrate any time.
Cheonan-si, South KoreaBIO-RAD QS-1200
used
- Manufacturer: Bio-Rad
- Model: QS-1200
BIO-RAD FT-IR QS-1200 Spectrometer .FTS-175 Spectrometer - He-Ne Laser - IR Source - DTGS Detector - KBr Beam Splitter .Up to 12 Inch, Wafer Tray/Nose Cone .FTS Power Supply .Windows XP PC & LCD Monitor .EPI / BP...
Cheonan-si, South Korea2004 N&K N&K 3700 RT
used
- Manufacturer: N&K
Broadband spectrometry for film thickness on transparent substrates, including photomask reticles. The n&k 3700-RT automated system is designed for handling 5” or 6” square masks or up to 8” square samples. These...
Cheonan-si, South KoreaKLA TENCOR P-2
used
- Manufacturer: KLA-Tencor
- Model: P-2
- Long Scan Profiler Measurement. - Standard Head with L type stylus. - 386DX PC & LCD Color Monitor, MS-DOS 6.22. - Anti-bivration table.
Cheonan-si, South Korea1996 NANOMETRICS 2100
used
- Manufacturer: Nanometrics
- silicon dioxide on silicon 400~ 30,000 A. - photo resist on silicon 500~ 40,000 A. - other thin films. *. Hardware configuration: - Optical microscope & objectives 5x,10x,40x. - Spectrophotometer Head. - Microc...
Cheonan-si, South Korea1995 KLA TENCOR P-10
used
- Manufacturer: KLA-Tencor
- Model: P-10
- Standard Head with L(yellow) type stylus. - Intel Pentium 233Mhz Ram:32MB , HDD: 2GB - Installed in Clean-room.
Cheonan-si, South Korea