Used Lithography (Photolithography)

5V DC Power Supply Small

• used

• Manufacturer: Nikon

Cosel

Wafer Chuck Robot Controller x2

• used

• Manufacturer: Nikon

S-205

Wafer Loader Touch Screen

• used

• Manufacturer: Nikon

4S018-568-A

Reticle Robot Controller

• used

• Manufacturer: Nikon

Reticle Controller LIB I/F PCB

• used

• Manufacturer: Nikon

4S013-187-A

Reticle Loader Link RX Pcb

• used

• Manufacturer: Nikon

4S013-188-B

Reticle Loader PPD3 Unit

• used

• Manufacturer: Nikon

Wafer Loader Robot

• used

• Manufacturer: Nikon

Wafer Loader Ceramic Load Arm

• used

• Manufacturer: Nikon

2002 TEL Tel act 8 coater/Developer

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

3 Coater 2 Developer Currently set up for 4 Inch

2007 SEREIN SVM250 II

• used

• Manufacturer: SEREIN

De-installed, Warehoused, Can be inspected

FEI TAITAN80-300

• used

• Manufacturer: FEI

De-installed, Warehoused, Can be inspected Wafer size: 300MM

1999 TEL Clean Track MARK7

• used

• Manufacturer: Tokyo Electron - TEL

De-installed, Warehoused, Can be inspected Wafer size: 300MM

2007 TEL Clean Track ACT 12

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-12

De-installed, Warehoused, Can be inspected Wafer size: 300MM

2000 TEL Clean Track ACT 8

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

De-installed, Warehoused, Can be inspected Wafer size: 200MM