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New Lithography (Photolithography) in South Korea

  • Wintel EUV

    Wintel EUV

    • new

    • Manufacturer: Wintel

    LPR (Low-Pressure Removal) PE ALD Poly Etcher HARC Doped ACL EER EUV Key Technologies ① Chamber contamination free ② High selectivity ③ rework rate: ＞10 times ④ Design to under layer strip

    Gyeonggi-do, South Korea