Used Photoresist Coating

DS SD-W80A-AVQ

• Manufacturer: Unknown

DS SD-W80A-AVQ Polyimide Developper 8″ Vintage

DS SC-W80A-AG

• Manufacturer: Unknown

DS SC-W80A-AG SOG Coater 8″ Vintage

DNS FC-3000

• Manufacturer: Dainippon Screen

DNS FC-3000 (DNS No. 32) WTR MODULE(FRONT SIDE),DHF/QDR-HF/SC1/QDR-HCL 300 mm Vintage 2006

DNS FC-3000

• Manufacturer: Dainippon Screen

DNS FC-3000 SPM/HQDR/BHF/QDR/SC1/QDR-HCL 300 mm Vintage 2006

DNS WS-820L

• Manufacturer: Dainippon Screen

DNS WS-820L N/A 200 mm Vintage

DNS SU3200 12ch

• Manufacturer: Dainippon Screen

DNS SU3200 (12ch) N/A 300 mm Vintage 2014

Takitori ATM-1100C

• Manufacturer: Unknown

Takitori ATM-1100C Resist Laminator (#2) 200 mm Vintage

Karl Suss RC 16RC5 SPIN COATER

• Manufacturer: SÜSS MicroTec

Karl Suss RC 16(RC5) SPIN COATER

Tokyo Electron Ltd CLEAN TRACK LITHIUS Pro i

• Manufacturer: Tokyo Electron - TEL
• Model: Lithius

Tokyo Electron Ltd. CLEAN TRACK LITHIUS Pro i

Tokyo Electron Ltd LITHIUS 300mm

• Manufacturer: Tokyo Electron - TEL
• Model: Lithius

Tokyo Electron Ltd LITHIUS 300mm

FSI 03-15366-001

• Manufacturer: FSI

FSI 03-15366-001 CUP COVER, COATER/DEVELOPER 30 day parts warranty on all new parts. Available 2017

TEL Lithius Robot

• Manufacturer: Tokyo Electron - TEL
• Model: Lithius

Varian photo's additional

• Manufacturer: Varian

TEL Lithius I+

• Manufacturer: Tokyo Electron - TEL
• Model: Lithius

COT/DEV

TEL LITHIUS SB 193nm standalone

• Manufacturer: Tokyo Electron - TEL
• Model: Lithius

TEL LITHIUS SB 193nm standalone